WILMINGTON, Mass. (AP) — WILMINGTON, Mass. (AP) — Onto Innovation Inc. (ONTO) on Thursday reported third-quarter profit of $53.1 million.

The Wilmington, Massachusetts-based company said it had net income of $1.07 per share. Earnings, adjusted for one-time gains and costs, were $1.34 per share.

The results topped Wall Street expectations. The average estimate of five analysts surveyed by Zacks Investment Research was for earnings of $1.31 per share.

The maker of semiconductor manufacturing equipment posted revenue of $252.2 million in the period, also topping Street forecasts. Five analysts surveyed by Zacks expected $250.5 million.

For the current quarter ending in December, Onto Innovation expects its per-share earnings to range from $1.33 to $1.48.

The company said it expects revenue in the range of $253 million to $267 million for the fiscal fourth quarter.

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This story was generated by Automated Insights (http://automatedinsights.com/ap) using data from Zacks Investment Research. Access a Zacks stock report on ONTO at https://www.zacks.com/ap/ONTO